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Characteristics of Flue Gas Using Direct Combustion of VOC and Ammonia

Kim JS Choi SC Jeong SH Mock CS Kim DB

Vol. 28, No. 2, pp. 131-137, Jun. 2022

10.7464/ksct.2022.28.2.131

Semiconductor process

Volatile Organic Compound

Equivalence ratio

Flameless combustion